NIBE is one of the leading manufacturers of systems for intelligent heating and control for the semiconductor industry. NIBE’s subsidiary Therm-X works with customers in the semiconductor industry who use radiofrequency power in the production of plate semiconductors (wafers). The manufacturing process is subject to extremely stringent uniformity and quality requirements and therefore strict requirements in respect of control. A multi-point monitoring system for temperature, pressure and vibration which uses fibreoptic technology supplied by Therm-X helps guarantee control.

The challenge is to be able to perform multi-point monitoring using equipment that is impervious to radiofrequency energy. Therm-X fibreoptic sensors for measurement use light via fibre directed towards a wafer, where the wavelength of the reflected light provides readings. The sensors can measure up to 50 points both inside and outside the process chamber to help the customer better understand and control their process.